Most Memorable Super Bowl Halftime Performances

With the Big Game happening this weekend there are a few online debates starting.
Of course, the debate of who is going to win.
There is another debate about the coaches, who will take off their mask first.
Best National Anthem of all-time
And best halftime performances.
In no particular order one list has Beyonce, Lady Gaga, Michael Jackson, U2, Janet and Justin Timberlake, Diana Ross, Paul McCartney, Bruce Springsteen and Madonna as best performances.
Can you rank the best Big Game halftime performances?